Lozovan A.A., Betsofen S.Ya., Lenkovets A.S., Shalin A.V., Ivanov N.A. Sputtering by inverted magnetrons: influence on the texture and residual stresses in four layer Ta/W/Ta/W coatings. Izvestiya. Non-Ferrous Metallurgy. 2023;(4):48-59. https://doi.org/10.17073/0021-3438-2023-4-48-59
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