For citations:
Kiryukhantsev-Korneev F.V., Sheveyko A.N., Levashov E.A., Shtansky D.V. Investigation of the Si–B–C–N Thin Coatings Deposited Using Magnetron Sputtering of SiBC Targets. Izvestiya. Non-Ferrous Metallurgy. 2015;(4):55-62. (In Russ.) https://doi.org/10.17073/0021-3438-2015-4-55-62
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