cvmetИзвестия вузов. Цветная металлургияIzvestiya. Non-Ferrous Metallurgy0021-34382412-8783НИТУ МИСИС10.17073/0021-3438-2026.502C.1747cvmet-1747Research ArticleЛитейное производствоFoundryКомбинированный метод получения бездефектных слитков высокоэнтропийного сплава TiZrAlVCr и их применение в качестве катодов-мишеней для формирования покрытийA combined method for producing defect-free ingots of the high-entropy alloy TiZrAlVCr and their use as cathode targets for coating depositionhttps://orcid.org/0000-0003-1387-8819СавинаЯ. Н.SavinaYa. N.

Яна Николаевна Савина – аспирант, инженер-исследователь Научно-исследовательского института физики перспективных материалов

Россия, 450076, г. Уфа, ул. Заки Валиди, 32

Yana N. Savina – Postgraduate Student, Research Engineer, Research Institute of Physics of Advanced Mate­rials

32 Zaki Validi Str., Ufa 450076, Russia

savina.yana18@yandex.ruhttps://orcid.org/0000-0003-1584-2385ВалиевР. Р.ValievR. R.

Роман Русланович Валиев – к.т.н, ст.науч.сотр.

Россия, 450076, г. Уфа, ул. Заки Валиди, 32

Roman R. Valiev – Cand. Sci. (Eng.), Senior Research Scientist

32 Zaki Validi Str., Ufa 450076, Russia

rovaliev@gmail.comhttps://orcid.org/0000-0002-9983-654XСанинВ. В.SaninV. V.

Виталий Владимирович Санин – к.т.н, начальник лаборатории металлургических процессов

Россия, 111524, г. Москва, ул. Электродная, 2, стр. 1

Vitaly V. Sanin – Cand. Sci. (Eng.), Head of the Laboratory of Metallurgical Processes

1 Bld, 2 Elektrodnaya Str., Moscow 111524, Russia

vivsanin@rosatom.ruhttps://orcid.org/0000-0001-9481-3149МежеваяЛ. Ю.MezhevayaL. Yu.

Лилия Юрьевна Межевая – начальник испытательного аналитико-сертификационного центра

Россия, 111524, г. Москва, ул. Электродная, 2, стр. 1

Liliya Yu. Mezhevaya – Head of the Analytical Certification Center

1 Bld, 2 Elektrodnaya Str., Moscow 111524, Russia

lymezhevaya@rosatom.ruhttps://orcid.org/0009-0001-3756-9845ЖивотворевМ. В.ZhivotvorevM. V.

Максим Владимирович Животворев – науч. сотрудник лаборатории металлургических процессов

Россия, 111524, г. Москва, ул. Электродная, 2, стр. 1

Maksim V. Zhivotvorev – Research Scientist, Laboratory of Metallurgical Processes

1 Bld, 2 Elektrodnaya Str., Moscow 111524, Russia

MVZhivotvorev@rosatom.ruhttps://orcid.org/0000-0002-7836-3990МодинаЮ. М.ModinaYu. M.

Юлия Михайловна Модина – к.т.н., ст. науч.сотрудник лаборатории многофункциональных материалов

Россия, 450076, г. Уфа, ул. Заки Валиди, 32

Yuliya M. Modina – Cand. Sci. (Eng.), Senior Research Scien­tist, Laboratory of Multifunctional Materials

32 Zaki Validi Str., Ufa 450076, Russia

modina_yulia@mail.ruhttps://orcid.org/0000-0002-4711-4721НазаровА. Ю.NazarovA. Yu.

Алмаз Юнирович Назаров – к.т.н., ст. преподаватель кафедры «Технология машиностроения»

Россия, 450076, г. Уфа, ул. Заки Валиди, 32

Almaz Yu. Nazarov – Cand. Sci. (Eng.), Senior Lecturer, Department of Mechanical Engineering Technology

32 Zaki Validi Str., Ufa 450076, Russia

nazarov_almaz15@mail.ruРамазановК. Н.RamazanovK. N.

Камиль Нуруллаевич Рамазанов – д.т.н., зав. кафедрой «Технология машиностроения»

Россия, 450076, г. Уфа, ул. Заки Валиди, 32

Kamil N. Ramazanov – Dr. Sci. (Eng.), Head of the Department of Mechanical Engineering Technology

32 Zaki Validi Str., Ufa 450076, Russia

ramazanovkn@gmail.comУфимский университет науки и технологийРоссияUfa University of Science and TechnologyRussian FederationАО «Гиредмет» им. Н.П. СажинаРоссияJSC “Giredmet” named after N.P. SazhinRussian Federation2026041020263235161Copyright © Савина Я.Н., Валиев Р.Р., Санин В.В., Межевая Л.Ю., Животворев М.В., Модина Ю.М., Назаров А.Ю., Рамазанов К.Н., 20262026Савина Я.Н., Валиев Р.Р., Санин В.В., Межевая Л.Ю., Животворев М.В., Модина Ю.М., Назаров А.Ю., Рамазанов К.Н.Savina Y.N., Valiev R.R., Sanin V.V., Mezhevaya L.Y., Zhivotvorev M.V., Modina Y.M., Nazarov A.Y., Ramazanov K.N.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://cvmet.misis.ru/jour/article/view/1747

Представлены результаты получения комбинированным методом сплавления и переплава высокоэнтропийного сплава системы Ti–Zr–Al–V–Cr, предназначенного для практического использования в качестве катодов-мишеней для вакуумно-дуговых установок типа ННВ-6.6. Показано, что прямой переплав компонентов в вакуумно-дуговой печи с медным кристаллизатором приводит к растрескиванию слитков из-за высоких термических напряжений (скорость охлаждения 102–103 °C/с), а отключение охлаждения вызывает загрязнение медью. Для решения этой проблемы предложен комбинированный метод: предварительное сплавление компонентов в вакуумно-дуговой печи с последующими переплавом в вакуум­ной индукционной печи и разливкой в изложницу. При этом применялась специальная керамическая футеровка на основе оксидов с добавкой до 2 мас. % оксидов РЗМ, обеспечившая минимальное примесное загрязнение. Подобраны оптимальные параметры кристаллизации: снижение скорости охлаждения до 5–10 °C/с, использование медной подложки для направленного теплоотвода и прибыльной надставки для компенсации усадочных явлений. Методами растровой электронной микроскопии и энергодисперсионного анализа подтверждена химическая однородность полученных слитков (содержание элементов Ti, Zr, Al, V, Cr составило в среднем 16–27 ат. %). Микротвердость сплава была в пределах 768–789 HV с высокой воспроизводимостью между партиями. Проведена успешная практическая апробация катодов в установке ННВ-6.6-И1: получены моно-, много- и мультислойные покрытия на подложках из титанового сплава ВТ-6. Таким образом, разработанная технология обеспечивает получение бездефектных слитков заданной геометрии (\(\emptyset \)80–85 мм, h = 45 мм), пригодных для промышленного использования в процессах вакуумно-дугового напыления защитных покрытий.

This article presents the results of producing a high-entropy alloy of the Ti–Zr–Al–V–Cr system, intended for practical use as cathode targets in NNV-6.6 vacuum arc systems, using a combined method of melting and remelting. It is shown that direct remelting of the components by vacuum arc melting (VAM) in a copper mould leads to cracking of ingots due to high thermal stresses (cooling rate of 102–103 °C/s), while switching off cooling causes copper contamination. To solve the problem, a combined method is proposed: preliminary melting of the components by VAM, followed by vacuum induction remelting (VIM) and casting into a mold. A special ceramic lining based on oxides containing up to 2 wt. % rare-earth metal oxides was used, ensuring minimal impurity contamination. The optimal crystallization parameters were selected: reduction of the cooling rate to 5–10 °C/s, use of a copper base plate for directional heat extraction and a feeder head to compensate for shrinkage effects. Scanning electron microscopy and energy-dispersive X-ray spectroscopy confirmed the chemical homogeneity of the resulting ingots (the contents of Ti, Zr, Al, V, and Cr were 16–27 at. %). The microhardness of the alloy was 768–789 HV with high reproducibility across batches. The cathode targets were successfully tested in the NNV-6.6-I1 installation: single-layer and two types of multilayer coatings were deposited on substrates made of Ti–6Al–4V titanium alloy. The developed technology ensures the production of defect-free ingots of a specified geometry (\(\emptyset \)80–85 mm, h = 45 mm), suitable for industrial use in vacuum arc deposition processes for protective coatings.

высокоэнтропийный сплав системы Ti–Zr–Al–V–Crвакуумно-дуговая плавкаВДПвакуумная индукционная плавкаВИПкатод-мишенькристаллизациятермические напряженияусадочная раковинафутеровкамикротвердостьпокрытияhigh-entropy alloyTiZrAlVCrvacuum arc meltingVAMvacuum induction meltingVIMcathode targetcrystallizationthermal stressesshrinkage cavityliningmicrohardnesscoatingsИсследование выполнено за счет гранта Российского научного фонда № 23-79-10118, https://rscf.ru/project/23-79-10118/.This work was supported by the Russian Science Foundation under grant no.23-79-10118, https://rscf.ru/en/project/23-79-10118/.ReferencesКаблов Е.Н., Мубояджян С.А. Эрозионностойкие покрытия для лопаток компрессора газотурбинных двигателей. Электрометаллургия. 2016;(10):23–38.Kablov E.N., Muboyadzhyan S.A. Erosion-resistant coa­tings for gas turbine engine compressor blades. Russian Metallurgy (Metally). 2017;2017(6):494–504. https://doi.org/10.1134/S0036029517060118Dong Y., Jiao Z., Ma Y., Zhou Q., Yang M., Ran X., Wang Z., Tang C., Li Y., Li X., Teng H., Lu X., Liu X. A systematic review on advanced surface coating technologies for high-pressure piston pumps. Defence Techno­logy. 2025;S2214914725003423. https://doi.org/10.1016/j.dt.2025.10.018Dong Y., Jiao Z., Ma Y., Zhou Q., Yang M., Ran X., Wang Z., Tang C., Li Y., Li X., Teng H., Lu X., Liu X. A systematic review on advanced surface coating technologies for high-pressure piston pumps. Defence Techno­logy. 2025;S2214914725003423. https://doi.org/10.1016/j.dt.2025.10.018Fotovvati B., Namdari N., Dehghanghadikolaei A. On coating techniques for surface protection: A review. Journal of Manufacturing and Materials processing. 2019;3(1):28. https://doi.org/10.3390/JMMP3010028Fotovvati B., Namdari N., Dehghanghadikolaei A. On coating techniques for surface protection: A review. Journal of Manufacturing and Materials processing. 2019;3(1):28. https://doi.org/10.3390/JMMP3010028Шуберт А.В., Коновалов С.В., Панченко И.А. Обзор исследований высокоэнтропийных сплавов, их свойств, методов создания и применения. Обработка металлов (технология, оборудование, инструменты). 2024;26(4):153–179. https://doi.org/10.17212/1994-6309-2024-26.4-153-179Shubert A.V., Konovalov S.V., Panchenko I.A. A review of research on high-entropy alloys, its properties, methods of creation and application. Obrabotka metallov (tekhnologiya, oborudovanie, instrumenty) = Metal Working and Material Science. 2024;26(4):153–179. (In Russ.). https://doi.org/10.17212/1994-6309-2024-26.4-153-179Olorundaisi E., Olubambi P.A. The prospect and limitation of high entropy alloy as 4th industrial material. Materials Today Sustainability. 2025;31:101163. https://doi.org/10.1016/j.mtsust.2025.101163Olorundaisi E., Olubambi P.A. The prospect and limitation of high entropy alloy as 4th industrial material. Materials Today Sustainability. 2025;31:101163. https://doi.org/10.1016/j.mtsust.2025.101163Arya P.K., Sathiaraj D., Patel V.K., Saxena K.K., Soni D.K., Rakesh C., Khan M.I. Developments in fabrication properties and applications of light weight high entropy alloys. Results in Engineering. 2025;27:105955. https://doi.org/10.1016/j.rineng.2025.105955Arya P.K., Sathiaraj D., Patel V.K., Saxena K.K., Soni D.K., Rakesh C., Khan M.I. Developments in fabrication properties and applications of light weight high entropy alloys. Results in Engineering. 2025;27:105955. https://doi.org/10.1016/j.rineng.2025.105955Sharma A. High entropy alloy coatings and technology. Coatings. 2021;11:372. https://doi.org/10.3390/coatings11040372Sharma A. High entropy alloy coatings and technology. Coatings. 2021;11:372. https://doi.org/10.3390/coatings11040372Li W., Liu P., Liaw P. K. Microstructures and properties of high-entropy alloy films and coatings: A review. Materials Research Letters. 2018;6:199–229. https://doi.org/10.1080/21663831.2018.1434248Li W., Liu P., Liaw P. K. Microstructures and properties of high-entropy alloy films and coatings: A review. Materials Research Letters. 2018;6:199–229. https://doi.org/10.1080/21663831.2018.1434248Duchaniya R.K., Pandel U., Rao P. Coatings based on high entropy alloys: An overview. Materials Today: Proceedings. 2021;44:4467–4473. https://doi.org/10.1016/j.matpr.2020.10.720Duchaniya R.K., Pandel U., Rao P. Coatings based on high entropy alloys: An overview. Materials Today: Proceedings. 2021;44:4467–4473. https://doi.org/10.1016/j.matpr.2020.10.720Li W., Liu P., Liaw P. K. Microstructures and properties of high-entropy alloy films and coatings: a review. Materials Research Letters. 2018;6(4):199–229. https://doi.org/10.1080/21663831.2018.1434248Li W., Liu P., Liaw P. K. Microstructures and properties of high-entropy alloy films and coatings: a review. Materials Research Letters. 2018;6(4):199–229. https://doi.org/10.1080/21663831.2018.1434248Ghadami F. Functionally-graded high-entropy alloy coa­tings: New frontiers in cutting edge industrial applications. Materials Today Communications. 2026;50:114610. https://doi.org/10.1016/j.mtcomm.2025.114610Ghadami F. Functionally-graded high-entropy alloy coa­tings: New frontiers in cutting edge industrial applications. Materials Today Communications. 2026;50:114610. https://doi.org/10.1016/j.mtcomm.2025.114610Liu H., Liu L., Xin C. Effect of alloying elements on the structure and mechanical properties of NbMoTaWX (X = Cr, V, Ti, Zr, and Hf) refractory high-entropy alloys. AIP Advances. 2021;11(2):025044. https://doi.org/10.1063/5.0038405Liu H., Liu L., Xin C. Effect of alloying elements on the structure and mechanical properties of NbMoTaWX (X = Cr, V, Ti, Zr, and Hf) refractory high-entropy alloys. AIP Advances. 2021;11(2):025044. https://doi.org/10.1063/5.0038405Senkov O.N., Woodward C., Miracle D.B. Microstructure of aluminum-containing refractory high-entropy alloys. JOM. 2014;66(10):2030–2042. https://doi.org/10.1007/s11837-014-1066-0Senkov O.N., Woodward C., Miracle D.B. Microstructure of aluminum-containing refractory high-entropy alloys. JOM. 2014;66(10):2030–2042. https://doi.org/10.1007/s11837-014-1066-0Zhu M., Yao L., Liu Y., Zhang M., Li K., Jian Z. Microstructure evolution and mechanical properties of a novel CrNbTiZrAlx (0.25≤ x ≤ 1.25) eutectic refractory high-entropy alloy. Materials Letters. 2020;272:127869. https://doi.org/10.1016/j.matlet.2020.127869Zhu M., Yao L., Liu Y., Zhang M., Li K., Jian Z. Microstructure evolution and mechanical properties of a novel CrNbTiZrAlx (0.25≤ x ≤ 1.25) eutectic refractory high-entropy alloy. Materials Letters. 2020;272:127869. https://doi.org/10.1016/j.matlet.2020.127869Wang J., Zeng Q., He W., Wang Z., Ning Z., Zheng C., Pang Z., Wei X. Attempt of TiZrVCrAl coating on aerospace bearings – Lower friction coefficient in oil-liquid mixed media. Journal of Vacuum Science & Technology A. 2023;41(5):053108. https://doi.org/10.1116/6.0002843Wang J., Zeng Q., He W., Wang Z., Ning Z., Zheng C., Pang Z., Wei X. Attempt of TiZrVCrAl coating on aerospace bearings – Lower friction coefficient in oil-liquid mixed media. Journal of Vacuum Science & Technology A. 2023;41(5):053108. https://doi.org/10.1116/6.0002843He L., Liu C., Zhao S., Shu C., Yang J., Liu H., Zhang W., Lin J., Long J., Chang H. Microstructure, mechanical and corrosion properties of high hardness TiVZrCrAl HEA coatings prepared by magnetron sputtering. Surface and Coatings Technology. 2022;441:128532. https://doi.org/10.1016/j.surfcoat.2022.128532He L., Liu C., Zhao S., Shu C., Yang J., Liu H., Zhang W., Lin J., Long J., Chang H. Microstructure, mechanical and corrosion properties of high hardness TiVZrCrAl HEA coatings prepared by magnetron sputtering. Surface and Coatings Technology. 2022;441:128532. https://doi.org/10.1016/j.surfcoat.2022.128532Lothrop A., Yang Q., Huang X., Wu X. Characterization of (AlCrTiVZr) N high-entropy coating produced by cathodic arc evaporation. Journal of Materials Engineering and Performance. 2024;33(14):7240–7252. https://doi.org/10.1007/s11665-023-08485-1Lothrop A., Yang Q., Huang X., Wu X. Characterization of (AlCrTiVZr) N high-entropy coating produced by cathodic arc evaporation. Journal of Materials Engineering and Performance. 2024;33(14):7240–7252. https://doi.org/10.1007/s11665-023-08485-1Xu Y., Li G., Li G., Gao F., Xia Y. Effect of bias volta­ge on the growth of super-hard (AlCrTiVZr)N high-ent­ropy alloy nitride films synthesized by high power impulse magnetron sputtering. Applied Surface Science. 2021;564:150417. https://doi.org/10.1016/j.apsusc.2021.150417Xu Y., Li G., Li G., Gao F., Xia Y. Effect of bias volta­ge on the growth of super-hard (AlCrTiVZr)N high-ent­ropy alloy nitride films synthesized by high power impulse magnetron sputtering. Applied Surface Science. 2021;564:150417. https://doi.org/10.1016/j.apsusc.2021.150417Xu Y., Li G., Xia Y. Synthesis and characterization of super-hard AlCrTiVZr high-entropy alloy nitride films deposited by HiPIMS. Applied Surface Science. 2020;523:146529. https://doi.org/10.1016/j.apsusc.2020.146529Xu Y., Li G., Xia Y. Synthesis and characterization of super-hard AlCrTiVZr high-entropy alloy nitride films deposited by HiPIMS. Applied Surface Science. 2020;523:146529. https://doi.org/10.1016/j.apsusc.2020.146529Arun S., Radhika N., Saleh B. Advances in vacuum arc melting for high entropy alloys: A review. Vacuum. 2024;226:113314. https://doi.org/10.1016/j.vacuum.2024.113314Arun S., Radhika N., Saleh B. Advances in vacuum arc melting for high entropy alloys: A review. Vacuum. 2024;226:113314. https://doi.org/10.1016/j.vacuum.2024.113314Salifu S., Olubambi P.A. Effects of fabrication techniques on the mechanical properties of high entropy alloys: A review. International Journal of Lightweight Materials and Manufacture. 2024;7:97–121. https://doi.org/10.1016/j.ijlmm.2023.08.001Salifu S., Olubambi P.A. Effects of fabrication techniques on the mechanical properties of high entropy alloys: A review. International Journal of Lightweight Materials and Manufacture. 2024;7:97–121. https://doi.org/10.1016/j.ijlmm.2023.08.001Abdul Salam M.Y., Ogunmuyiwa E.N., Manisa V.K., Yahy­a A., Badruddin I.A. Effect of fabrication techniques of high entropy alloys: A review with integration of machine learning. Results in Engineering. 2025;25:104441. https://doi.org/10.1016/j.rineng.2025.104441Abdul Salam M.Y., Ogunmuyiwa E.N., Manisa V.K., Yahy­a A., Badruddin I.A. Effect of fabrication techniques of high entropy alloys: A review with integration of machine learning. Results in Engineering. 2025;25:104441. https://doi.org/10.1016/j.rineng.2025.104441Zhang B., Huang Y., Dou Z., Wang J., Huang Z. Refractory high-entropy alloys fabricated by powder metallurgy: Progress, challenges and opportunities. Journal of Science: Advanced Materials and Devices. 2024;9:100688. https://doi.org/10.1016/j.jsamd.2024.100688Zhang B., Huang Y., Dou Z., Wang J., Huang Z. Refractory high-entropy alloys fabricated by powder metallurgy: Progress, challenges and opportunities. Journal of Science: Advanced Materials and Devices. 2024;9:100688. https://doi.org/10.1016/j.jsamd.2024.100688Tarasov B.P., Fursikov P.V., Arbuzov A.A., Shamov I.D., Melnikov S.A., Sanin V.V., Rachko S.Y., Davids M.W., Martin T.C., Lototskyy M.V. Influence of preparation and processing routes on the activation and hydrogen sorption performance of hydrogen storage alloys based on TiFe intermetallic. Journal of Alloys and Compounds. 2025;1047:184886. https://doi.org/10.1016/j.jallcom.2025.184886Tarasov B.P., Fursikov P.V., Arbuzov A.A., Shamov I.D., Melnikov S.A., Sanin V.V., Rachko S.Y., Davids M.W., Martin T.C., Lototskyy M.V. Influence of preparation and processing routes on the activation and hydrogen sorption performance of hydrogen storage alloys based on TiFe intermetallic. Journal of Alloys and Compounds. 2025;1047:184886. https://doi.org/10.1016/j.jallcom.2025.184886Sanin V.V., Shamov I.D., Rzheutskii A.A., Tarasov B.P., Lototskyy M.V., Melnikov S.A. Features of metallurgy of titanium hydride-forming alloys. High Energy Chemistry. 2024;58(4): S496–S506. https://doi.org/10.1134/S0018143924701571Sanin V.V., Shamov I.D., Rzheutskii A.A., Tarasov B.P., Lototskyy M.V., Melnikov S.A. Features of metallurgy of titanium hydride-forming alloys. High Energy Chemistry. 2024;58(4): S496–S506. https://doi.org/10.1134/S0018143924701571

The authors declare that there are no conflicts of interest present.