cvmetИзвестия вузов. Цветная металлургияIzvestiya. Non-Ferrous Metallurgy0021-34382412-8783НИТУ "МИСИС"10.17073/0021-3438-2021-4-70-77cvmet-1279Research ArticleМеталловедение и термическая обработкаPhysical Metallurgy and Heat TreatmentСтруктура и свойства композитных TiN–Pb-покрытий, напыленных на сплав вт6 магнетронным распылением постоянного токаStructure and properties of TiN–Pb composite coatings deposited on VT6 alloy by DC magnetron sputteringЛозованА. А.LozovanA. A.

Доктор технических наук, профессор кафедры технологий и систем автоматизированного проектирования металлургических процессов

125993, г. Москва, Волоколамское шоссе, 4

Dr. Sci. (Eng.), Prof., Department of technologies and systems for computer-aided design of metallurgical processes (TSCADMP)

125993, Russia, Moscow, Volokolamskoe shosse, 4

loz-plasma@yandex.ruБецофенС. Я.BetsofenS. Ya.

Доктор технических наук, профессор кафедры материаловедения и технологии обработки материалов

125993, г. Москва, Волоколамское шоссе, 4

Dr. Sci. (Eng.), Prof., Department of materials science and materials processing technology (MSMPT)

125993, Russia, Moscow, Volokolamskoe shosse, 4

s.betsofen@gmail.comЛяховецкийМ. А.LyakhovetskiyM. A.

Кандидат технических наук, доцент, старший научный сотрудник кафедры технологии производства двигателей летательных аппаратов

125993, г. Москва, Волоколамское шоссе, 4

Cand. Sci. (Eng.), Assistant prof., Senior scientist research, Department of technology of production of aircraft engines (TPAE)

125993, Russia, Moscow, Volokolamskoe shosse, 4

maxim.lyakhovetskiy@mai.ruПавловЮ. С.PavlovYu. S.

Инженер кафедры ТиСАПРМП

125993, г. Москва, Волоколамское шоссе, 4

Engineer, Department of TSCADMP

125993, Russia, Moscow, Volokolamskoe shosse, 4

pavlov_yuri93@mail.ruГрушинИ. А.GrushinI. A.

Кандидат технических наук, старший инженер кафедры

125993, г. Москва, Волоколамское шоссе, 4

Cand. Sci. (Eng.), Senior engineer, Department of MSMPT

125993, Russia, Moscow, Volokolamskoe shosse, 4

grushin_ivan@bk.ruКубатинаЕ. П.KubatinaE. P.

Заведующий лабораторией кафедры ТиСАПРМП

125993, г. Москва, Волоколамское шоссе, 4

Head of the Laboratory, Department of TSCADMP

125993, Russia, Moscow, Volokolamskoe shosse, 4

yekaterina.kubatina@yandex.ruНиколаевИ. А.NikolaevI. A.

Инженер кафедры ТПДЛА

125993, г. Москва, Волоколамское шоссе, 4

Engineer, Department of TPAE

125993, Russia, Moscow, Volokolamskoe shosse, 4

racer4500@yandex.ruМосковский авиационный институт (МАИ) (Национальный исследовательский университет)РоссияMoscow Aviation Institute (National Research University)Russian Federation202113082021047077Copyright © Лозован А.А., Бецофен С.Я., Ляховецкий М.А., Павлов Ю.С., Грушин И.А., Кубатина Е.П., Николаев И.А., 20212021Лозован А.А., Бецофен С.Я., Ляховецкий М.А., Павлов Ю.С., Грушин И.А., Кубатина Е.П., Николаев И.А.Lozovan A.A., Betsofen S.Y., Lyakhovetskiy M.A., Pavlov Y.S., Grushin I.A., Kubatina E.P., Nikolaev I.A.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://cvmet.misis.ru/jour/article/view/1279

Методом реакционного магнетронного распыления постоянного тока двух раздельных моноэлементных мишеней Ti и Pb напыляли композитное покрытие состава TiN–Pb на подложку из титанового сплава ВТ6. Исследования проводили при токах на Pb-катоде 0,2 и 0,1 А и двух фиксированных значениях расхода аргона: 6,0 либо 8,5 см3/мин, меняя от опыта к опыту расход подаваемого в камеру азота. Состав покрытий определяли энергодисперсионным анализом. Показано, что количество свинца в покрытиях составляло от 0,5 до 16 мас.% в зависимости от тока на Pb-катоде и расхода реактивного азота. Для каждого режима напыления оценивали микротвердость и износ покрытий. Установлено, что в зависимости от отношения потоков аргона и азота толщина покрытий менялась от 1,9 до 5,2 мкм. Рентгеноструктурным методом исследовали влияние параметров нанесения магнетронных TiN–Pb-покрытий на их структуру и фазовый состав. Выявлено, что при значениях тока на Pb-катоде, равном 0,2 А, покрытие состоит из Pb и PbO, а при токе 0,1 А – из TiN, Pb и PbO. При этом увеличение отношения потоков аргона и азота приводит к росту доли TiN, повышению интенсивности насыщения поверхности титановой подложки азотом, а также увеличению микротвердости и износостойкости. При всех условиях напыления TiN-покрытие характеризуется типичной текстурой (111), интенсивность которой меняется немонотонно.

DC reactive magnetron sputtering of two separate single-element Ti and Pb targets was used to deposit a TiN–Pb composite coating onto a substrate made of the VT6 titanium alloy. The studies were carried out at Pb cathode currents of 0.2 and 0.1 A and two fixed argon flow rate values of 6.0 or 8.5 cm3/min, and the flow rate of nitrogen supplied to the chamber varying from experiment to experiment. The composition of coatings was determined by energy dispersive analysis. It was shown that the amount of lead in the coatings ranged from 0.5 to 16 wt.% depending on the Pb cathode current and reactive nitrogen consumption. Coating microhardness and wear were determined for each deposition mode. It was found that coating thicknesses varied from 1.9 to 5.2 μm depending on the ratio of argon and nitrogen fluxes. The effect of TiN–Pb magnetron coating deposition parameters on the structure and phase composition was investigated by X-ray diffraction method. It was shown that the coating consists of Pb and PbO at the Pb cathode current of 0.2 A, and of TiN, Pb, and PbO at the current of 0.1 A, while an increase in the ratio of argon and nitrogen fluxes leads to an increase in the fraction of TiN, the intensity of titanium substrate surface saturation with nitrogen, as well as microhardness and wear resistance. Under all deposition conditions the TiN coating features by a typical texture (111), the intensity of which varies nonmonotonically.

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The authors declare that there are no conflicts of interest present.